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RF-magnetron Sputtering Unit
AIST-NT Omega/Combi (TERS)
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Monday
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18
1
2
9:00 - STO deposition
3
9:00 - STO deposition
4
9:00 - STO deposition
5
6
7
19
8
8:00 - Pt TopElectrodes
9
10
9:00 - STO deposition
11
9:00 - STO deposition
12
9:00 - STO deposition
13
14
20
15
16
9:00 - STO deposition
17
18
11:30 - Pt TopElectrodes
19
9:00 - STO deposition
20
21
21
22
23
9:00 - PVDF deposition
24
9:00 - STO deposition
25
9:00 - Al deposition
26
9:00 - STO deposition
27
28
22
29
9:00 - Upgrade
30
9:00 - STO deposition
31
8:00 - Pt TopElectrodes
1
9:00 - pvdf deposition
2
9:00 - STO deposition
3
4
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