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RF-magnetron Sputtering Unit
AIST-NT Omega/Combi (TERS)
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22
29
9:00 - Upgrade
30
9:00 - STO deposition
31
8:00 - Pt TopElectrodes
1
9:00 - pvdf deposition
2
9:00 - STO deposition
3
4
23
5
12:00 - PVDF deposition
6
7
8
9:00 - STO deposition
9
9:00 - STO deposition
10
11
24
12
13
10:00 - PVDF
14
15
16
17
18
25
19
13:30 - Upgrade
20
21
9:00 - STO deposition
22
23
24
25
26
26
9:00 - STO deposition
27
28
10:00 - pvdf deposition
29
30
1
2
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